One challenge for ultra-fast micro machining is throughput. The operational capacity of these processes can be maximized by increasing the scan rate or the number of beams – parallel processing. This contribution focuses on process parallelism of ultra-short pulsed lasers with high repetition rate and individually addressable acousto-optical beam modulation. The core of the multi-beam generation is a smooth diffractive beam splitter component with high uniform spots and negligible loss, and a prismatic array compressor to match beam size and pitch. The optical design and the practical realization of an 8 beam processing head in combination with a high average power single mode ultra-short pulsed laser source are presented as well as the currently on-going and promising laboratory research and micro machining results. Finally, an outlook of scaling the processing head to several tens of beams is given.
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Oliver Homburg, Manfred Jarczynski, Thomas Mitra, Stephan Brüning, "Ultra-short pulse laser micro patterning with highest throughput by utilization of a novel multi-beam processing head," Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 100921C (17 February 2017);