17 February 2017 Study of TLIPSS formation on different metals and alloys and their selective etching
Author Affiliations +
Experimental investigation of thermochemical laser-induced periodic surface structures (TLIPSS) formation on metal films (Ti, Cr, Ni, NiCr) at different processing conditions is presented. The hypothesis that the TLIPSS formation depends significantly on parabolic rate constant for oxide thin film growth is discussed. Evidently, low value of this parameter for Ni is the reason of TLIPSS absence on Ni and NiCr film with low Cr content. The effect of simultaneous ablative (with period ≈λ) and thermochemical (with period ≈λ) LIPSS formation was observed. The formation of structures after TLIPSS selective etching was demonstrated.
Conference Presentation
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Alexandr V. Dostovalov, Alexandr V. Dostovalov, Victor P. Korolkov, Victor P. Korolkov, Vadim S. Terentiev, Vadim S. Terentiev, Konstantin A. Okotrub, Konstantin A. Okotrub, Fedor N. Dultsev, Fedor N. Dultsev, Anton Nemykin, Anton Nemykin, Sergey A. Babin, Sergey A. Babin, } "Study of TLIPSS formation on different metals and alloys and their selective etching", Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 100921H (17 February 2017); doi: 10.1117/12.2251341; https://doi.org/10.1117/12.2251341

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