17 February 2017 Nanostructuring of sapphire using time-modulated nanosecond laser pulses
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Abstract
The nanostructuring of dielectric surfaces using laser radiation is still a challenge. The IPSM-LIFE (laser-induced front side etching using in-situ pre-structured metal layer) method allows the easy, large area and fast laser nanostructuring of dielectrics. At IPSM-LIFE a metal covered dielectric is irradiated where the structuring is assisted by a self-organized molten metal layer deformation process. The IPSM-LIFE can be divided into two steps:

STEP 1: The irradiation of thin metal layers on dielectric surfaces results in a melting and nanostructuring process of the metal layer and partially of the dielectric surface.

STEP 2: A subsequent high laser fluence treatment of the metal nanostructures result in a structuring of the dielectric surface. At this study a sapphire substrate Al2O3(1-102) was covered with a 10 nm thin molybdenum layer and irradiated by an infrared laser with an adjustable time-dependent pulse form with a time resolution of 1 ns (wavelength λ = 1064 nm, pulse duration Δtp = 1 – 600 ns, Gaussian beam profile). The laser treatment allows the fabrication of different surface structures into the sapphire surface due to a pattern transfer process. The resultant structures were investigated by scanning electron microscopy (SEM). The process was simulated and the simulation results were compared with experimental results.
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P. Lorenz, P. Lorenz, I. Zagoranskiy, I. Zagoranskiy, M. Ehrhardt, M. Ehrhardt, L. Bayer, L. Bayer, K. Zimmer, K. Zimmer, } "Nanostructuring of sapphire using time-modulated nanosecond laser pulses", Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 100921P (17 February 2017); doi: 10.1117/12.2251826; https://doi.org/10.1117/12.2251826
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