27 March 2017 In situ observation of ultrafast laser induced micro nano structures using structured light illumination
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Abstract
Ultrafast laser pulses can be used to achieve structuring of surfaces at the micro-nano scale. Under certain irradiation conditions, Laser Induced Periodic Surface Structures (LIPSS) are formed. The LIPSS dimensions range from 100 nm to 2-3 micrometers. The characterization is generally conducted after the laser irradiation by systems such as SEM and/or AFM with a resolution beyond the diffraction limit. In this paper, we use a super resolution microscopy technique based on structured illumination for in-situ observation of the irradiated surface. The LIPSS formation on steel and Si is observed IN-SITU and discussed for a multipulse sequence.
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Alberto Aguilar, Alberto Aguilar, Jean-Philippe Colombier, Jean-Philippe Colombier, Razvan Stoian, Razvan Stoian, Cyril Mauclair, Cyril Mauclair, "In situ observation of ultrafast laser induced micro nano structures using structured light illumination", Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 1009220 (27 March 2017); doi: 10.1117/12.2257348; https://doi.org/10.1117/12.2257348
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