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Single laser pulses with 1026nm wavelength, 6ps (FWHM) pulse duration and 200μJ pulse energy were applied to fused silica, Borofloat 33 and Gorilla glass. Electron densities around 1 x 1020cm-3 in the focal plane and 1 x 1019cm-3 in front of the focus are obtained, independent from the glass type used. The free carriers slowly decay within several ns, while the decay time depends on both the maximum electron densities reached and glass species. In this process a part of the excited electrons relax within several 10ps into a long-living stage where a transient effect is observed. Here, various probe wavelengths show differences in the recorded signal. A further carrier relaxation leads to permanent (stress, voids) and non-stable (color center) modifications crucial for precise glass dicing applications. |
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