15 February 1989 Applications Of Laser Diodes In Interferometry
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Proceedings Volume 1010, Industrial Inspection; (1989) https://doi.org/10.1117/12.949192
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Two laser diode-based interferometers are described. The first one, which is only briefly described here, is a two-wavelength scanning spot interferometer employing two laserdiodes. This interferometer has been used for surface contouring with micrometer resolution. The second interferometer, which will be emphasised in this paper, is a heterodyne interferometer. This interferometer is particularly useful for surface profiling with nanometer resolution.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. J. den Boef, A. J. den Boef, } "Applications Of Laser Diodes In Interferometry", Proc. SPIE 1010, Industrial Inspection, (15 February 1989); doi: 10.1117/12.949192; https://doi.org/10.1117/12.949192

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