15 February 1989 Computer-Aided Surface Analysis la Fringe Projection
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Proceedings Volume 1010, Industrial Inspection; (1989) https://doi.org/10.1117/12.949253
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
Three-dimensional topography of non-optical surfaces has been measured by projection fringe interferometry and developed computer algorithm decoding. Fundamental parameters characterizing the roughness of tested surface were evaluated. The resolution dynamic range was shown to present a large span from submicron to millimeters according to frequency carrier adjustment. The demonstrated technique has presented significant advantages over mechanical based profilometry and other optical techniques. However, the application of the method appears to extend beyond conventional mechanical surface analysis. Further, it was brought to evidence the possibilities of conceiving other methods of surface topographic metrology by laser beam modulation.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Oliverio D.D. Soares, Oliverio D.D. Soares, Silverio P. Almeida, Silverio P. Almeida, Augusto O.S. Gomes, Augusto O.S. Gomes, } "Computer-Aided Surface Analysis la Fringe Projection", Proc. SPIE 1010, Industrial Inspection, (15 February 1989); doi: 10.1117/12.949253; https://doi.org/10.1117/12.949253
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