High performance amorphous Zn-Sn-O: impact of composition, microstructure, and thermal treatments in the optoelectronic properties

Monica Morales-Masis; Esteban Rucavado; Quentin Jeangros; Federica Landuchi; Aïcha Hessler-Wyser; Christophe Ballif

doi:10.1117/12.2252603

24 February 2017 High performance amorphous Zn-Sn-O: impact of composition, microstructure, and thermal treatments in the optoelectronic properties

Monica Morales-Masis, Esteban Rucavado, Quentin Jeangros, Federica Landuchi, Aïcha Hessler-Wyser, Christophe Ballif

Author Affiliations +

Proceedings Volume 10105, Oxide-based Materials and Devices VIII; 101050D (2017) https://doi.org/10.1117/12.2252603
Event: SPIE OPTO, 2017, San Francisco, California, United States

Abstract

Zinc and tin oxides are both earth-abundant materials with demonstrated applicability as electrodes in several optoelectronic devices. The presence of grain boundaries in these polycrystalline films generally limits the electron mobility. By a combinatorial study of ZnO and SnO₂, a transparent conducting amorphous zinc tin oxide (ZTO) electrode, free of grain boundaries, with a dense (void-free) microstructure has been developed. We show how tuning the stoichiometry (Zn_4.5Sn_30.2O_65.3) and film’s microstructure during sputtering deposition, allows achieving electron mobilities up to 25 cm²/Vs and free carrier concentrations of ~ 7 x 10¹⁹ cm^-3. The effects of post-deposition thermal treatments are furthermore studied. The ZTO films keep their dense amorphous microstructure upon annealing up to 500°C, as confirmed by cross-section TEM and XRD, while presenting a clear improvement in electron mobility up to 35 cm²/Vs when annealed in oxygen-rich atmospheres.

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Monica Morales-Masis, Esteban Rucavado, Quentin Jeangros, Federica Landuchi, Aïcha Hessler-Wyser, and Christophe Ballif "High performance amorphous Zn-Sn-O: impact of composition, microstructure, and thermal treatments in the optoelectronic properties", Proc. SPIE 10105, Oxide-based Materials and Devices VIII, 101050D (24 February 2017); https://doi.org/10.1117/12.2252603

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