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20 February 2017 3D label-free super-resolution imaging
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Proceedings Volume 10110, Photonic Instrumentation Engineering IV; 101100L (2017)
Event: SPIE OPTO, 2017, San Francisco, California, United States
Scanning white light interferometry (SWLI) is a label free optical 3D imaging modality with a vertical sensitivity of a few Ångströms (Å). However, this optical far-field system, is laterally diffraction limited and resolves only a few hundred nanometers. We overcome this limit with microspheres that each produces a photonic nanojet. Thus sub- 100 nm features can laterally be resolved. To validate the performance of Photonic nanoJet based Interferometry (PJI) we compared it to techniques that provide sub-100 nm lateral resolution; Super-Resolution SWLI, atomic force microscope, and scanning electron microscope. We used a recordable Blu-ray disc as sample. Such a disc features a grooved surface topology with heights in the range of 20 nm and with distinguishable sub-100 nm lateral features that are unresolved by diffraction limited optics. We achieved agreement between all three measurement devices across lateral and vertical dimensions.
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© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anton Nolvi, Edward Hæggström, Kim Grundström, and Ivan Kassamakov "3D label-free super-resolution imaging", Proc. SPIE 10110, Photonic Instrumentation Engineering IV, 101100L (20 February 2017);

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