20 February 2017 Multi-wavelength VCSEL arrays using high-contrast gratings
Author Affiliations +
Proceedings Volume 10113, High Contrast Metastructures VI; 101130B (2017) https://doi.org/10.1117/12.2256348
Event: SPIE OPTO, 2017, San Francisco, California, United States
The use of a high-contrast grating (HCG) as the top mirror in a vertical-cavity surface-emitting laser (VCSEL) allows for setting the resonance wavelength by the grating parameters in a post-epitaxial growth fabrication process. Using this technique, we demonstrate electrically driven multi-wavelength VCSEL arrays at ~980 nm wavelength. The VCSELs are GaAs-based and the suspended GaAs HCGs were fabricated using electron-beam lithography, dry etching and selective removal of an InGaP sacrificial layer. The air-coupled cavity design enabled 4-channel arrays with 5 nm wavelength spacing and sub-mA threshold currents thanks to the high HCG reflectance.
Conference Presentation
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Erik Haglund, Erik Haglund, Johan S. Gustavsson, Johan S. Gustavsson, Wayne V. Sorin, Wayne V. Sorin, Jörgen Bengtsson, Jörgen Bengtsson, David Fattal, David Fattal, Åsa Haglund, Åsa Haglund, Michael Tan, Michael Tan, Anders Larsson, Anders Larsson, } "Multi-wavelength VCSEL arrays using high-contrast gratings", Proc. SPIE 10113, High Contrast Metastructures VI, 101130B (20 February 2017); doi: 10.1117/12.2256348; https://doi.org/10.1117/12.2256348

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