20 February 2017 Direct-laser metal writing of surface acoustic wave transducers for integrated-optic spatial light modulators in lithium niobate
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Abstract
Recently, the fabrication of high-resolution silver nanostructures using a femtosecond laser-based direct write process in a gelatin matrix was reported. The application of direct metal writing towards feature development has also been explored with direct metal fusion, in which metal is fused onto the surface of the substrate via a femtosecond laser process. In this paper, we present a comparative study of gelatin matrix and metal fusion approaches for directly laser-written fabrication of surface acoustic wave transducers on a lithium niobate substrate for application in integrated optic spatial light modulators.
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Bianca C. Datta, Nickolaos Savidis, Michael Moebius, Sundeep Jolly, Eric Mazur, V. Michael Bove, "Direct-laser metal writing of surface acoustic wave transducers for integrated-optic spatial light modulators in lithium niobate", Proc. SPIE 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X, 101150W (20 February 2017); doi: 10.1117/12.2250590; https://doi.org/10.1117/12.2250590
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