20 February 2017 Laser nanolithography and pyrolysis of SZ2080 hybrid for slowing light in 3D photonic crystals
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Abstract
In this work we explore a possibility to apply ultrafast 3D laser nanolithography in conjunction with pyrolysis to acquire glass-ceramic 3D structures in micro- and nano-scale. Laser fabrication allows for production of initial 3D structures with relatively small (hundreds nm - μm) feature sizes out of SZ2080 hybrid material. Then, postfabrication heating at 600°C in Ar atmosphere decomposes organic part of the material leaving the glass-ceramic component of the hybrid. Resulting structures are uniformly shrunk by 40%. This brings us one step closer to fabricating highly efficient slow-light absorbers.
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Darius Gailevicius, Darius Gailevicius, Linas Jonušauskas, Linas Jonušauskas, Danas Sakalauskas, Danas Sakalauskas, Zeki Hayran, Zeki Hayran, Hamza Kurt, Hamza Kurt, Mirbek Turduev, Mirbek Turduev, Simas Šakirzanovas, Simas Šakirzanovas, Saulius Juodkazis, Saulius Juodkazis, Vygantas Mizeikis, Vygantas Mizeikis, Roaldas Gadonas, Roaldas Gadonas, Kestutis Staliunas, Kestutis Staliunas, Mangirdas Malinauskas, Mangirdas Malinauskas, } "Laser nanolithography and pyrolysis of SZ2080 hybrid for slowing light in 3D photonic crystals", Proc. SPIE 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X, 1011511 (20 February 2017); doi: 10.1117/12.2250537; https://doi.org/10.1117/12.2250537
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