20 February 2017 Compact optical MEMS accelerometers and temperature sensors
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Proceedings Volume 10116, MOEMS and Miniaturized Systems XVI; 101160G (2017) https://doi.org/10.1117/12.2250345
Event: SPIE OPTO, 2017, San Francisco, California, United States
Abstract
Continuous and accurate monitoring of acceleration and temperature inside large turbo- and hydro-generators is of crucial importance to prevent extremely expensive system damages and false positives. Development of optical, metalfree sensors for such systems has gained a lot of attention due to the fact that they are resistant to typically very strong electromagnetic fields and that they are non-conductive. We present miniature temperature and accelerometer optical sensors using a common silicon MEMS platform. A linear response with a deviation as small as 1% between set and measured accelerations has been obtained in an acceleration range 0-40g. Preliminary tests for temperature sensors indicate a linear response with sensitivity better than 1°C in a range of 20°C to 150°C.
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Branislav Timotijevic, Branislav Timotijevic, Yves Petremand, Yves Petremand, Dara Bayat, Dara Bayat, Markus Luetzelschwab, Markus Luetzelschwab, Laurent Aebi, Laurent Aebi, Maurizio Tormen, Maurizio Tormen, } "Compact optical MEMS accelerometers and temperature sensors", Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI, 101160G (20 February 2017); doi: 10.1117/12.2250345; https://doi.org/10.1117/12.2250345
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