10 March 1989 A New Interferometer For Measuring Ultra-Small Thickness And Spacing
Author Affiliations +
Proceedings Volume 1012, In-Process Optical Measurements; (1989) https://doi.org/10.1117/12.949336
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
A method utilizing a visible-infrared interferometric technique has been developed to measure the thickness of ultra-thin films, the small spacing between two separated surfaces and the variations in the spacing. Successful measurements for the thickness of a thin magnetic film on a metallic substrate, the spacing between a magnetic head slider and a quartz disk, and the magnetic head slider fluctuations above a quartz disk are demonstrated. Specially designed single bounce reflectance attachment is used for the wavelength range from 400 nm to 700 nm and from 700 nm to 2500 nm. The wide range of the wavelength allows a vast variety of film material to be measured. Based on an intensity analysis of the reflection interference beams from the top and the bottom surfaces of the film over a wide spectrum, a relation of the intensity maximums and minimums vs. wavelength is obtained to calculate the film thickness, the spacing and the slider fluctuation. An optical thickness of L/10 (L is the wavelength) is obtained by a careful numerical analysis of the measured data which is significantly less than the limitation, L/4, by the conventional method for the first time.'
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dong-sheng Wang, Dong-sheng Wang, Jin-wen Liang, Jin-wen Liang, } "A New Interferometer For Measuring Ultra-Small Thickness And Spacing", Proc. SPIE 1012, In-Process Optical Measurements, (10 March 1989); doi: 10.1117/12.949336; https://doi.org/10.1117/12.949336


Thin films for magneto-optical recording
Proceedings of SPIE (December 31 1992)
Ultra-thin DLC overcoats for improved areal density
Proceedings of SPIE (March 20 2000)
Surface Flatness Measurement System
Proceedings of SPIE (October 10 1989)
Thin film approach for pi achromatic phase shifters
Proceedings of SPIE (February 24 2004)

Back to Top