High-responsivity 100GHz waveguide UTC photodetector

T. Umezawa; K. Akahane; A. Matsumoto; A. Kanno; N. Yamamoto; T. Kawanishi

doi:10.1117/12.2250246

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28 January 2017 High-responsivity 100GHz waveguide UTC photodetector

T. Umezawa, K. Akahane, A. Matsumoto, A. Kanno, N. Yamamoto, T. Kawanishi

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Proceedings Volume 10128, Broadband Access Communication Technologies XI; 1012807 (2017) https://doi.org/10.1117/12.2250246
Event: SPIE OPTO, 2017, San Francisco, California, United States

Abstract

We present a double cladding, high-mesa-type waveguide UTC photodetector with an improved the responsivity. In this device structure, an InGaAs thin core layer was sandwiched by p-InP/InGaAsP and n-InP/InGaAsP cladding layers, including a UTC structure, in order to obtain a good optical coupling between the waveguide and the fiber. By comparing the resulting mode field with that obtained with a single cladding layer structure, we confirmed that the vertical mode field was enlarged. Without a spot size converter, the measured responsivity was as high as 0.6 A/W at 1550 nm, which suggests a responsivity three times higher than that of back-illuminated structures, and higher responsivity than that of previous reports. A high frequency performance (f_3dB = 100 GHz) was also measured. The device structure, including the layer, doping level conditions, and optical fiber coupling results are discussed, and its performance is characterized in detail.

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T. Umezawa, K. Akahane, A. Matsumoto, A. Kanno, N. Yamamoto, and T. Kawanishi "High-responsivity 100GHz waveguide UTC photodetector", Proc. SPIE 10128, Broadband Access Communication Technologies XI, 1012807 (28 January 2017); https://doi.org/10.1117/12.2250246

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