5 April 1989 0.01 Micron Resolution Fibre Optic Positioning Stage
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Proceedings Volume 1014, Micro-Optics; (1989) https://doi.org/10.1117/12.949397
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
A 2-axis compact microtranslator stage is describedl. It is part of a system including ultra-precision translation units and various controller options for digital programmable positioning or closed loop automatic alignment. Its design relies on a systematic application of flexure technology for guiding and transmission of movements, resulting in a considerable reduction of the adverse effects of backlash, friction and wear. A combination of monolithic planar elastic bodies allows for a translation in the xy plane with coupling between axes kept under 0.05 % over the entire 1000 x 1000 micron displacement range. The driving mechanism assembly consists of a prestressed bolt-screw pair acting on a rigid reduction lever with less than 0.03 % transmission non-linearity. All elementary displacement functions can be performed using dedicated microcontrollers for high performance DC motor position control with incremental angular encoders. The position within the entire xy field can thus be defined and maintained without additional electrical or optical feedback at 0.1 micron accuracy and 0.01 micron resolution. A description of the basic concepts, their implementation and the device performance is given, together with comments on the possibilities offered in this field.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Philippe Schwab, Philippe Schwab, Thomas Edye, Thomas Edye, Pierre M. Genequand, Pierre M. Genequand, } "0.01 Micron Resolution Fibre Optic Positioning Stage", Proc. SPIE 1014, Micro-Optics, (5 April 1989); doi: 10.1117/12.949397; https://doi.org/10.1117/12.949397
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