Aberration Properties Of The Planar Microlens Array And Its Applicatio S To Imaging Optics

K. Hamanaka; H. Nemoto; M. Oikawa; E. Okuda

doi:10.1117/12.949423

5 April 1989 Aberration Properties Of The Planar Microlens Array And Its Applicatio S To Imaging Optics

K. Hamanaka, H. Nemoto, M. Oikawa, E. Okuda

Proceedings Volume 1014, Micro-Optics; (1989) https://doi.org/10.1117/12.949423
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Aberration properties of planar microlens arrays, which are small lenslet arrays fabricated by an ion exchange technique, are described. The optical set-up of the measurement system. is designed to combine a Mach-Zehnder interferometer, a microscope imaging set-up and fringe scanning analysis to obtain precise measurements for microlenses. Many types of planar microlens have been measured, and the spherical aberration, coma in off-axis imaging etc., were evaluated. The experimental results indicate that the planar microlens can perform high quality imaging in a wide image field. Also, by using planar microlens arrays, multiple imaging optical systems in incoherent and coherent illumination are demonstrated.

Citation Download Citation

K. Hamanaka, H. Nemoto, M. Oikawa, and E. Okuda "Aberration Properties Of The Planar Microlens Array And Its Applicatio S To Imaging Optics", Proc. SPIE 1014, Micro-Optics, (5 April 1989); https://doi.org/10.1117/12.949423

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