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5 April 1989 Fully Planar GaAs Waveguides By Spin-On Glass Zinc Diffusion
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Proceedings Volume 1014, Micro-Optics; (1989) https://doi.org/10.1117/12.949406
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
We present the details of a new fabrication technique for making planar waveguides in III-V semiconductors. Using this technique we made single mode totally planar waveguides in GaAs with measured propagation losses of 1.9 dB/cm.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Y. Gigase, R. Baets, M. Belanger, and S. I. Najafi "Fully Planar GaAs Waveguides By Spin-On Glass Zinc Diffusion", Proc. SPIE 1014, Micro-Optics, (5 April 1989); https://doi.org/10.1117/12.949406
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