23 December 2016 Preparation of ring resonator based on PDMS using laser lithography
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Proceedings Volume 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 1014215 (2016) https://doi.org/10.1117/12.2264360
Event: 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2016, Jasna, Slovakia
Abstract
In this paper we present preparation process of ring resonator in racetrack configuration based on polydimethylsiloxane (PDMS). 3D laser lithography in combination with imprinting technique was used to pattern photoresist layer as a master for imprinting process. In the next step, PDMS ring resonator was imprinted and filled with core PDMS. Finally, morphological properties of prepared device were investigated by scanning electron microscope (SEM) and confocal microscope and transmission spectrum measurements were performed.
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D. Jandura, D. Pudis, P. Gaso, "Preparation of ring resonator based on PDMS using laser lithography", Proc. SPIE 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 1014215 (23 December 2016); doi: 10.1117/12.2264360; https://doi.org/10.1117/12.2264360
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