24 March 2017 Irresistible Materials multi-trigger resist: the journey towards high volume manufacturing readiness
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Abstract
Irresistible Materials (IM) is a UK company spun out of the University of Birmingham. It is developing novel resist systems based on the Multi-trigger concept, and spin-on-carbon hardmask materials. IM has developed a new EUV resist that is nonmetal based, does not need a post exposure bake (PEB), and delivers high sensitivity, excellent contact hole resolution, with low LER. It is being readied for HVM through a partnership with Nano-C, Inc. (the Massachusetts based manufacturer of advanced electronic materials and chemicals). The transition to scalability will be the highlight of this discussion.
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Warren Montgomery, Warren Montgomery, Alexandra McClelland, Alexandra McClelland, David Ure, David Ure, John Roth, John Roth, Alex P. G. Robinson, Alex P. G. Robinson, } "Irresistible Materials multi-trigger resist: the journey towards high volume manufacturing readiness", Proc. SPIE 10143, Extreme Ultraviolet (EUV) Lithography VIII, 1014328 (24 March 2017); doi: 10.1117/12.2258092; https://doi.org/10.1117/12.2258092
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