21 March 2017 Selective surface smoothening of 3D micro-optical elements
Author Affiliations +
We have established a non-contact polishing process for thermoplastic, polymeric microlenses and –prisms with dimensions of up to 50 μm, including sharp convex tips and rims with sub-μm details. The required 3D master structures were fabricated using direct laser-writing lithography with two-photon absorption. Master structures were replicated into poly(methyl methacrylate) through a poly(dimethyl siloxane) intermediate copying step and exposed with 172 nm UV light. Due to the reduction of glass transition temperature in a surface-confined layer, roughness in the range of more than 100 nm could subsequently be smoothed-out to below 10 nm by annealing the surface by heating.
Conference Presentation
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Helmut Schift, Nachiappan Chidambaram, Mirco Altana, and Robert Kirchner "Selective surface smoothening of 3D micro-optical elements", Proc. SPIE 10144, Emerging Patterning Technologies, 101440B (21 March 2017); doi: 10.1117/12.2256358; https://doi.org/10.1117/12.2256358

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