27 April 2017 Advanced fast 3D DSA model development and calibration for design technology co-optimization
Author Affiliations +
Direct Optimization (DO) of a 3D DSA model is a more optimal approach to a DTCO study in terms of accuracy and speed compared to a Cahn Hilliard Equation solver. DO’s shorter run time (10X to 100X faster) and linear scaling makes it scalable to the area required for a DTCO study. However, the lack of temporal data output, as opposed to prior art, requires a new calibration method. The new method involves a specific set of calibration patterns. The calibration pattern’s design is extremely important when temporal data is absent to obtain robust model parameters. A model calibrated to a Hybrid DSA system with a set of device-relevant constructs indicates the effectiveness of using nontemporal data. Preliminary model prediction using programmed defects on chemo-epitaxy shows encouraging results and agree qualitatively well with theoretical predictions from a strong segregation theory.
Conference Presentation
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kafai Lai, Kafai Lai, Balint Meliorisz, Balint Meliorisz, Thomas Muelders, Thomas Muelders, Ulrich Welling, Ulrich Welling, Hans-Jürgen Stock, Hans-Jürgen Stock, Sajan Marokkey, Sajan Marokkey, Wolfgang Demmerle, Wolfgang Demmerle, Chi-Chun Liu, Chi-Chun Liu, Cheng Chi, Cheng Chi, Jing Guo, Jing Guo, } "Advanced fast 3D DSA model development and calibration for design technology co-optimization", Proc. SPIE 10144, Emerging Patterning Technologies, 101440H (27 April 2017); doi: 10.1117/12.2260379; https://doi.org/10.1117/12.2260379

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