28 March 2017 Designed tools for analysis of lithography patterns and nanostructures
Author Affiliations +
We introduce a set of designed tools for the analysis of lithography patterns and nano structures. The classical metrological analysis of these objects has the drawbacks of being time consuming, requiring manual tuning and lacking robustness and user friendliness. With the goal of improving the current situation, we propose new image processing tools at different levels: semi automatic, automatic and machine-learning enhanced tools. The complete set of tools has been integrated into a software platform designed to transform the lab into a virtual fab. The underlying idea is to master nano processes at the research and development level by accelerating the access to knowledge and hence speed up the implementation in product lines.
Conference Presentation
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Alexandre Dervillé, Alexandre Dervillé, Julien Baderot, Julien Baderot, Guilhem Bernard, Guilhem Bernard, Johann Foucher, Johann Foucher, Hanna Grönqvist, Hanna Grönqvist, Aurélien Labrosse, Aurélien Labrosse, Sergio Martinez, Sergio Martinez, Yann Zimmermann, Yann Zimmermann, } "Designed tools for analysis of lithography patterns and nanostructures", Proc. SPIE 10145, Metrology, Inspection, and Process Control for Microlithography XXXI, 101450I (28 March 2017); doi: 10.1117/12.2258612; https://doi.org/10.1117/12.2258612

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