Author Affiliations +
Emil Schmitt-Weaver,1 Venky Subramony,2 Zakir Ullah,2 Masazumi Matsunobu,2 Ravin Somasundaram,2 Joel Thomas,2 Linmiao Zhang,2 Klaus Thul,2 Kaustuve Bhattacharyya,1 Ronald Goossens,1 Cees Lambregts,1 Wim Tel,1 Chris de Ruiter1
1ASML Netherlands B.V. (Netherlands)
2Micron Technology, Inc. (United States)