28 March 2017 The use of computational inspection to identify process window limiting hotspots and predict sub-15nm defects with high capture rate
Author Affiliations +
Abstract
As critical dimensions for advanced two dimensional (2D) DUV patterning continue to shrink, the exact process window becomes increasingly difficult to determine. The defect size criteria shrink with the patterning critical dimensions and are well below the resolution of current optical inspection tools. As a result, it is more challenging for traditional bright field inspection tools to accurately discover the hotspots that define the process window. In this study, we use a novel computational inspection method to identify the depth-of-focus limiting features of a 10 nm node mask with 2D metal structures (single exposure) and compare the results to those obtained with a traditional process windows qualification (PWQ) method based on utilizing a focus modulated wafer and bright field inspection (BFI) to detect hotspot defects. The method is extended to litho-etch litho-etch (LELE) on a different test vehicle to show that overlay related bridging hotspots also can be identified.
Conference Presentation
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Boo-Hyun Ham, Boo-Hyun Ham, Il-Hwan Kim, Il-Hwan Kim, Sung-Sik Park, Sung-Sik Park, Sun-Young Yeo, Sun-Young Yeo, Sang-Jin Kim, Sang-Jin Kim, Dong-Woon Park, Dong-Woon Park, Joon-Soo Park, Joon-Soo Park, Chang-Hoon Ryu, Chang-Hoon Ryu, Bo-Kyeong Son, Bo-Kyeong Son, Kyung-Bae Hwang, Kyung-Bae Hwang, Jae-Min Shin, Jae-Min Shin, Jangho Shin, Jangho Shin, Ki-Yeop Park, Ki-Yeop Park, Sean Park, Sean Park, Lei Liu, Lei Liu, Ming-Chun Tien, Ming-Chun Tien, Angelique Nachtwein, Angelique Nachtwein, Marinus Jochemsen, Marinus Jochemsen, Philip Yan, Philip Yan, Vincent Hu, Vincent Hu, Christopher Jones, Christopher Jones, } "The use of computational inspection to identify process window limiting hotspots and predict sub-15nm defects with high capture rate", Proc. SPIE 10145, Metrology, Inspection, and Process Control for Microlithography XXXI, 101451P (28 March 2017); doi: 10.1117/12.2257964; https://doi.org/10.1117/12.2257964
PROCEEDINGS
12 PAGES + PRESENTATION

SHARE
Back to Top