27 March 2017 Highχ block copolymers for directed self-assembly patterning without the need for topcoat or solvent annealing
Author Affiliations +
Abstract
High-χ block copolymers for directed self-assembly (DSA) patterning that do not need topcoat or solvent annealing have been developed. A variety of functionalities have been successfully added into the block copolymers, such as balanced surface energy between the polymer blocks, outstandingly high χ, tunable glass transition temperature (Tg), and selective crosslinking. Perpendicular orientation control, as desired for patterning, of the block copolymers can be simply achieved by thermal annealing due to the equal surface energy of the polymer blocks at the annealing temperatures, which allows avoiding solvent annealing or top-coat. The χ value can be tuned up to achieve L0 as low as 8-10 nm for lamellar-structured block copolymers and hole/pillar size as small as 5-6 nm for cylinder-structured block copolymers. The Tg of the block copolymers can be tuned to improve the kinetics of thermal annealing by enhancing the polymer chain mobility. Block-selective crosslinking facilitates the pattern transfer by mitigating pattern collapse during wet etching and improving oxygen plasma etching selectivity between the polymer blocks. This paper provides an introductory review of our high-χ block copolymer materials with various functionalities for achieving improved DSA performance.
Conference Presentation
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kui Xu, Kui Xu, Mary Ann Hockey, Mary Ann Hockey, Eric Calderas, Eric Calderas, Douglas Guerrero, Douglas Guerrero, Daniel Sweat, Daniel Sweat, Jeffrey Fiehler, Jeffrey Fiehler, Richard Daugherty, Richard Daugherty, } "Highχ block copolymers for directed self-assembly patterning without the need for topcoat or solvent annealing", Proc. SPIE 10146, Advances in Patterning Materials and Processes XXXIV, 101460U (27 March 2017); doi: 10.1117/12.2257354; https://doi.org/10.1117/12.2257354
PROCEEDINGS
7 PAGES + PRESENTATION

SHARE
RELATED CONTENT


Back to Top