28 March 2017 Redundant via insertion in self-aligned double patterning
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Abstract
Redundant via (RV) insertion is employed to enhance via manufacturability, and has been extensively studied. Self-aligned double patterning (SADP) process, brings a new challenge to RV insertion since newly created cut for each RV insertion has to be taken care of. Specifically, when a cut for RV, which we simply call RV-cut, is formed, cut conflict may occur with nearby line-end cuts, which results in a decrease in RV candidates. We introduce cut merging to reduce the number of cut conflicts; merged cuts are processed with stitch using litho-etch-litho-etch (LELE) multi-patterning method. In this paper, we propose a new RV insertion method with cut merging in SADP for the first time. In our experiments, a simple RV insertion yields 55.3% vias to receives RVs; our proposed method that considers cut merging increases that number to 69.6% on average of test circuits.
Conference Presentation
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Youngsoo Song, Jinwook Jung, Youngsoo Shin, "Redundant via insertion in self-aligned double patterning", Proc. SPIE 10148, Design-Process-Technology Co-optimization for Manufacturability XI, 1014806 (28 March 2017); doi: 10.1117/12.2258036; https://doi.org/10.1117/12.2258036
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