Hotspot fixing methodologies are increasingly deployed during tapeouts as a means to optimize the tradeoffs between complex, highly accurate correction methods and faster methods that are sufficient for most pattern areas.1 However, pattern database hierarchies may not be optimum for these hotspot fixing flows, as they are optimized for the initial correction run or method. This paper examines the usage of pattern matching to regain hierarchy and significantly reduce turn-around-time for complex hotspot fixing methods. Gains in turn-around-time can be well over 50 times faster than reusing the original correction’s hierarchy.
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Bradley J. Falch, Seung-Hee Baek, John Tsai, Mingchao Ji, Jun Zhu, "Using pattern matching to increase performance in hotspot fixing flows," Proc. SPIE 10148, Design-Process-Technology Co-optimization for Manufacturability XI, 101481A (28 March 2017);