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11 April 1989 In Process Interferometry By Real-Time Fringe-Analysis
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Proceedings Volume 1015, Micromachining Optical Components and Precision Engineering; (1989)
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Interferometric measuring techniques are more and more used for the inspection of mechanical components with "quasi optical" properties. This paper presents a computer-aided interferometric measuring system for measuring optical as well as "non-optical" components.The specifications of the system are discussed, the field of application is demonstrated by various examples of industrial use. In addition to several applications in the field of interferometric investigations of components with reduced sensitivity ( wafers, masks, optical disks, ceramics, etc ), examples for the use of scan interferometry are presented. Scan interferometry allows the measurement of mechanical components with dimensions greater than the field of view of the interferometer. This can be achieved by the combination of interferometric measuring technique with ultraprecision mechanical positioning.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernd Breuckmann and Peter Langenbeck "In Process Interferometry By Real-Time Fringe-Analysis", Proc. SPIE 1015, Micromachining Optical Components and Precision Engineering, (11 April 1989);

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