11 April 1989 Manufacturing And Measuring Of Aspherics Integrated In One Ultra Precision Machine
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Proceedings Volume 1015, Micromachining Optical Components and Precision Engineering; (1989) https://doi.org/10.1117/12.949442
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Hembrug recently developed the method of tool-normality for machining aspherics on the Super-Mikroturn CNC ultra precision lathe. This method allows the single point diamond tool to be kept perpendicular to the surface and eliminates the influence of tool tip radius error. Due to the perpendicularity of the tool, this method also allows the integration of a dedicated sensor system for in-process measurement. The realisation is carried out by a hydrostatic, numerically controlled precision rotary table, together with a software package for 3-axis interpolation. To measure the surface topography and reflection value of metal optics, a non-contact sensor, consisting of a bundle of glass fibers concentrically arranged is now in development. A number of these fibers are connected to a light source and the remaining fibers are used to transmit the reflected light from the surface. The intensity of the reflected light versus the distance generates a diagram of which the shape characterizes the roughness and the reflection of the measured surface. The integration of such a dedicated sensor into an ultra precision machine tool in combination with the evaluated characteristic diagram makes it possible to obtain data of the shape of surface topography and reflection values performing the first step of an in-process adaptive control system. The paper will deal in greater detail with the development of this new concept of ultra precision machining and measuring problems connected to the process.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pierre H. Knol, Pierre H. Knol, Denes Szepesi, Denes Szepesi, P. Guenther Werner, P. Guenther Werner, Wilhelm Knappert, Wilhelm Knappert, } "Manufacturing And Measuring Of Aspherics Integrated In One Ultra Precision Machine", Proc. SPIE 1015, Micromachining Optical Components and Precision Engineering, (11 April 1989); doi: 10.1117/12.949442; https://doi.org/10.1117/12.949442


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