Moire Deflectometry - A Ray Tracing Alternative To Interferometry

Eliezer Keren; Kathi Kreske; Oded Kafri

doi:10.1117/12.949452

11 April 1989 Moire Deflectometry - A Ray Tracing Alternative To Interferometry

Eliezer Keren, Kathi Kreske, Oded Kafri

Proceedings Volume 1015, Micromachining Optical Components and Precision Engineering; (1989) https://doi.org/10.1117/12.949452
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Moire deflectometry is a versatile technique for measuring various properties of surfaces and transparent objects. The applications of the method to surface analysis include measurements of flatness, roughness, and in-plane and out-of-plane distortions. A microscope mode allows the detection and measurement of scratches and other imperfections. The sensitivity of the instrument is tunable from the millimetric to the interferometric range by a simple mechanical adjustment. This allows the matching of the fringe increment to any desired specification. The deflectometer is highly immune to mechanical shock and vibrations, a feature that allows it to be placed on the production floor. Flat and spherical surfaces may be analyzed in situ in real time. An IBM PC AT compatible computer software package displays contour maps of surface topography, slopes, curvature, roughness, etc.

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Eliezer Keren, Kathi Kreske, and Oded Kafri "Moire Deflectometry - A Ray Tracing Alternative To Interferometry", Proc. SPIE 1015, Micromachining Optical Components and Precision Engineering, (11 April 1989); https://doi.org/10.1117/12.949452

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KEYWORDS

Deflectometry

Interferometry

Moire patterns

Reflectivity

Spatial resolution

Collimation

Fringe analysis

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