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11 April 1989 The Geometrical And Dynamical Behaviour Of Ultraprecision Diamond Turning Machines Set Limits To The Workpiece Accuracy
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Proceedings Volume 1015, Micromachining Optical Components and Precision Engineering; (1989) https://doi.org/10.1117/12.949447
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
The influences of straightness errors and machine resonances on the surface of faced mirrors are discussed. Measurement results of the machine behaviour are compared with the surface shapes and micro-structure of produced workpieces. A correlation between the measurement results of the machine and the analysed workpiece surfaces is presented in this paper.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Weck, R. Hartel, and T. Bispink "The Geometrical And Dynamical Behaviour Of Ultraprecision Diamond Turning Machines Set Limits To The Workpiece Accuracy", Proc. SPIE 1015, Micromachining Optical Components and Precision Engineering, (11 April 1989); https://doi.org/10.1117/12.949447
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