11 November 2016 Development of swinging part profilometer for optics
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Proceedings Volume 10151, Optics and Measurement International Conference 2016; 101510B (2016) https://doi.org/10.1117/12.2256295
Event: Optics and Measurement 2016 International Conference, 2016, Liberec, Czech Republic
Abstract
A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.
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Peng Zhang, Jie Li, Guoyu Yu, David D. Walker, "Development of swinging part profilometer for optics", Proc. SPIE 10151, Optics and Measurement International Conference 2016, 101510B (11 November 2016); doi: 10.1117/12.2256295; https://doi.org/10.1117/12.2256295
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