19 October 2016 Study on the electromagnetic radiation characteristics of discharging excimer laser system
Author Affiliations +
Proceedings Volume 10152, High Power Lasers, High Energy Lasers, and Silicon-based Photonic Integration; 1015211 (2016) https://doi.org/10.1117/12.2247001
Event: International Symposium on Optoelectronic Technology and Application 2016, 2016, Beijing, China
Abstract
Excimer laser in condition of high voltage, large current and fast discharge will produce strong electromagnetic pulse radiation and electromagnetic interference on the around electrical equipment. The research on characteristics and distribution of excimer laser electromagnetic radiation could provide important basis for electromagnetic shielding and suppressing electromagnetic interference, and further improving the electromagnetic compatibility of system. Firstly, electromagnetic radiation source is analyzed according to the working principle of excimer laser. The key test points of the electromagnetic radiation, hydrogen thyratron, main discharge circuit and laser outlet, are determined by the mechanical structure and the theory of electromagnetic radiation. Secondly, characteristics of electromagnetic field were tested using a near field probe on the key positions of the vertical direction at 20, 50, and 80 cm, respectively. The main radiation frequencies and the radiation field characteristics in the near field are obtained. The experimental results show that the main radiation frequencies distribute in 47, 65, and 130 MHz for electric field and the main radiation frequencies distribute in 34, 100, and 165 MHz for magnetic field. The intensity of electromagnetic field decreases rapidly with the increase of test distance. The higher the frequency increases, the faster the amplitude attenuate. Finally, several electromagnetic interference suppression measurement methods are proposed from the perspective of electromagnetic compatibility according to the test results.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Duliang Zhao, Duliang Zhao, Xu Liang, Xu Liang, Xiaodong Fang, Xiaodong Fang, Qingsheng Wang, Qingsheng Wang, } "Study on the electromagnetic radiation characteristics of discharging excimer laser system", Proc. SPIE 10152, High Power Lasers, High Energy Lasers, and Silicon-based Photonic Integration, 1015211 (19 October 2016); doi: 10.1117/12.2247001; https://doi.org/10.1117/12.2247001
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT

Power up 120 Watt injection locked ArF excimer laser...
Proceedings of SPIE (April 11 2013)
193-nm excimer laser microstepper system
Proceedings of SPIE (August 13 1997)
Excimer laser in arthroscopic surgery
Proceedings of SPIE (April 30 1991)

Back to Top