The picosecond laser has ultrashort pulse and superstrong peak power, which make it being focused on and applied in the micro-nanoscale fabrication field. Silicone elastomer PDMS is a typical antifouling material which can desorb defacement, using picosecond laser etching the surface through the way of galvanometer scanning in order to obtain a surface with micro-nano texture. The article studied the relationship between process parameters such as the power density, the scanning rate and the appearance of etched groove respectively, especially the width and depth of the groove. The results show that : for single marking, with the raise of the laser power density I, the depth of the groove increases, the inclination angle of the side wall is reduced. In another time, with the increase of the scanning rate v ,the depth of the groove decreases gradually and the surface morphology cannot be seen clearly. For multiple marking, the depth of the groove shown a falling slope from big to small with the increase of marking number. Finally,we got a path to optimize the process parameters to obtain a surface with micro-nano structures. After testing the surface contact angle, we found that the surface contact angle increased from 113° to 152°,which reached the level of superhydrophobic surface.