Quite a lot of factors will make effects on beam pointing stability of an optical system, Among them, the element tolerance is one of the most important and common factors. In some large laser systems, it will make final micro beams spot on the image plane deviate obviously. So it is essential for us to achieve effective and accurate analysis theoretically on element tolerance. In order to make the analysis of beam pointing stability convenient and theoretical, we consider transmission of a single chief ray rather than beams approximately to stand for the whole spot deviation. According to optical matrix, we also simplify this complex process of light transmission to multiplication of many matrices. So that we can set up element tolerance model, namely having mathematical expression to illustrate spot deviation in an optical system with element tolerance. In this way, we can realize quantitative analysis of beam pointing stability theoretically. In second half of the paper, we design an experiment to get the spot deviation in a multipass optical system caused by element tolerance, then we adjust the tolerance step by step and compare the results with the datum got from tolerance model, finally prove the correction of tolerance model successfully.