In the optoelectronic integrated test system, surface profile and finish of the optical element are put forward higher request. Taking an aspherical quartz glass lens with a diameter of 200mm as example, taking Preston hypothesis as the theoretical basis, analyze the influence of surface quality of various process parameters, including the workpiece and the tool axis spindle speed, wheel type, concentration polishing, polishing mold species, dwell time, polishing pressure and other parameters. Using CNC method for the surface profile and surface quality of the lens were investigated. Taking profilometer measurement results as a guide, by testing and simulation analysis, process parameters were improved constantly in the process of manufacturing. Mid and high frequency error were trimmed and improved so that the surface form gradually converged to the required accuracy. The experimental results show that the final accuracy of the surface is less than 2µm and the surface finish is, which fulfils the accuracy requirement of aspherical focusing lens in optical system.