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Raman spectrometers are usually calibrated periodically to ensure their measurement accuracy of Raman shift. A combination of a piece of monocrystalline silicon chip and a low pressure discharge lamp is proposed as a candidate for the reference standard of Raman shift. A high precision calibration technique is developed to accurately determine the standard value of the silicon's Raman shift around 520cm-1. The technique is described and illustrated by measuring a piece of silicon chip against three atomic spectral lines of a neon lamp. A commercial Raman spectrometer is employed and its error characteristics of Raman shift are investigated. Error sources are evaluated based on theoretical analysis and experiments, including the sample factor, the instrumental factor, the laser factor and random factors. Experimental results show that the expanded uncertainty of the silicon's Raman shift around 520cm-1 can acheive 0.3 cm-1 (k=2), which is more accurate than most of currently used reference materials. The results are validated by comparison measurement between three Raman spectrometers. It is proved that the technique can remarkably enhance the accuracy of Raman shift, making it possible to use the silicon and the lamp to calibrate Raman spectrometers.
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