19 October 2016 Influence of surface characteristics on point laser interferometer for aspheric measurement
Author Affiliations +
Proceedings Volume 10155, Optical Measurement Technology and Instrumentation; 1015523 (2016) https://doi.org/10.1117/12.2246842
Event: International Symposium on Optoelectronic Technology and Application 2016, 2016, Beijing, China
A point laser interferometer for measuring aspheric optics is developed in this paper. The proposed laser interferometer will be used as a optical probe in optical coordinate measuring machines. The point optical probe is based on homodyne interferometry with frequency stabilized He-Ne laser to provide traceable measurements. The influences of various aspheric surface factors on the performance of point optical probe are analyzed, such as roughness, reflectivity, material, slope angle etc. A compensation method is applied in the signal processing system to reduce the influences. Experimental results show that the measurement resolution is at the nanometer level under various conditions.
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Xiaofei Diao, Xiaofei Diao, Zi Xue, Zi Xue, Yanhui Kang, Yanhui Kang, } "Influence of surface characteristics on point laser interferometer for aspheric measurement", Proc. SPIE 10155, Optical Measurement Technology and Instrumentation, 1015523 (19 October 2016); doi: 10.1117/12.2246842; https://doi.org/10.1117/12.2246842


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