19 October 2016 MEMS fiber-optic Fabry-Perot pressure sensor for high temperature application
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Proceedings Volume 10155, Optical Measurement Technology and Instrumentation; 101552H (2016) https://doi.org/10.1117/12.2247037
Event: International Symposium on Optoelectronic Technology and Application 2016, 2016, Beijing, China
Abstract
We design and demonstrate a fiber-optic Fabry–Perot pressure sensor (FOFPPS) for high-temperature sensing by employing micro-electro-mechanical system (MEMS) technology. The FOFPPS is fabricated by anodically bonding the silicon wafer and the Pyrex glass together and fixing the facet of the optical fiber in parallel with the silicon surface by glass frit and organic adhesive. The silicon wafer can be reduced through dry etching technology to construct the sensitive diaphragm. The length of the cavity changes with the deformation of the diaphragm due to the loaded pressure, which leads to a wavelength shift of the interference spectrum. The pressure can be gauged by measuring the wavelength shift. The pressure experimental results show that the sensor has linear pressure sensitivities ranging from 0 kPa to 600 kPa at temperature range between 20°C to 300°C. The pressure sensitivity at 300°C is approximately 27.63 pm/kPa. The pressure sensitivities gradually decrease with increasing the temperature. The sensor also has a linear thermal drift when temperature changes from 20°C - 300°C.
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G. C. Fang, P. G. Jia, Q. Cao, J. J. Xiong, "MEMS fiber-optic Fabry-Perot pressure sensor for high temperature application", Proc. SPIE 10155, Optical Measurement Technology and Instrumentation, 101552H (19 October 2016); doi: 10.1117/12.2247037; https://doi.org/10.1117/12.2247037
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