25 October 2016 Design and fabrication of linear Fresnel zone plates used for microspectrometer
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Proceedings Volume 10156, Hyperspectral Remote Sensing Applications and Environmental Monitoring and Safety Testing Technology; 101561C (2016) https://doi.org/10.1117/12.2246911
Event: International Symposium on Optoelectronic Technology and Application 2016, 2016, Beijing, China
Abstract
Fresnel zone plate is a classic optical element that however can be used as the core spectral component of micro-spectrometer, which optical path volume can be decreased to 1mm3. After passing through the Fresnel zone plate, monochromatic lights of different wavelengths will expand to spectrum because of their different focal length. We designed eight kinds of linear half zone plates to get different focal lengths and spectral performance. In the process of fabrication, we used the electron beam lithography and inductively coupled plasma (ICP) etching to produce the Fresnel zone plates. Finally, performances of Fresnel zone plates were examined by beam-split experiments. After comparison, the simulation conclusion in reference that the number of bands of Fresnel zone plates will affect the final appearance of the spectrum was verified.
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Ruicong Liu, Ruicong Liu, Yuanyuan Liu, Yuanyuan Liu, Fuhua Yang, Fuhua Yang, } "Design and fabrication of linear Fresnel zone plates used for microspectrometer ", Proc. SPIE 10156, Hyperspectral Remote Sensing Applications and Environmental Monitoring and Safety Testing Technology, 101561C (25 October 2016); doi: 10.1117/12.2246911; https://doi.org/10.1117/12.2246911
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