25 October 2016 The study of multilayer anti-reflection coating in InSb focal plane detector
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Proceedings Volume 10157, Infrared Technology and Applications, and Robot Sensing and Advanced Control; 101571D (2016) https://doi.org/10.1117/12.2246432
Event: International Symposium on Optoelectronic Technology and Application 2016, 2016, Beijing, China
Abstract
In manufacturing of InSb focal plane detector, InSb chip have to be polished from backside to reduce its thickness and then be plated a layer of coating to decrease its reflection (enhance its transmittance) for infrared ray. Moreover, the anti-reflection coating has to be multilayer for more anti-reflection bandwidth. In this article, it is introduced that the optimal design of triple layer λ/4 anti-reflection coating——the anodic oxide, SiNx and MgF2. The best thickness range of each layer and its theoretical reflective index are calculated from simulation software, until the refractive index of each layer has been measured by ellipsometer. And then the transmissivity and reflectivity of the triple layer coating are measured for testing and verifying its performance on the transmittance and reflection. In the end, the anti-reflective effect of the triple layer coating and monolayer SiNx coating are respectively measured and compared by infrared focal plane array measurement system. And it is showed that this triple layer coating achieved more anti-reflection bandwidth and better anti reflective effect.
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Kelin Zheng, Peng Wei, Liwen Wang, Xianjun Su, Haizhen Wang, "The study of multilayer anti-reflection coating in InSb focal plane detector", Proc. SPIE 10157, Infrared Technology and Applications, and Robot Sensing and Advanced Control, 101571D (25 October 2016); doi: 10.1117/12.2246432; https://doi.org/10.1117/12.2246432
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