8 December 2016 Soft X-ray microscope with nanometer spatial resolution and its applications
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Proceedings Volume 10159, Laser Technology 2016: Progress and Applications of Lasers; 101590W (2016) https://doi.org/10.1117/12.2259877
Event: XIth Symposium on Laser Technology, 2016, Jastarnia, Poland
Abstract
A compact size microscope based on nitrogen double stream gas puff target soft X-ray source, which emits radiation in water-window spectral range at the wavelength of λ = 2.88 nm is presented. The microscope employs ellipsoidal grazing incidence condenser mirror for sample illumination and silicon nitride Fresnel zone plate objective for object magnification and imaging. The microscope is capable of capturing water-window images of objects with 60 nm spatial resolution and exposure time as low as a few seconds. Details about the microscopy system as well as some examples of different applications from various fields of science, are presented and discussed.
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P. W. Wachulak, A. Torrisi, A. Bartnik, L. Wegrzynski, T. Fok, Z. Patron, H. Fiedorowicz, "Soft X-ray microscope with nanometer spatial resolution and its applications ", Proc. SPIE 10159, Laser Technology 2016: Progress and Applications of Lasers, 101590W (8 December 2016); doi: 10.1117/12.2259877; https://doi.org/10.1117/12.2259877
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