Metal Oxyfluoride Coatings For Energy-Efficient Windows

K. A. Khan; S. J. Jiang; Z.-C. Jin; C. G. Granqvist

doi:10.1117/12.949924

6 March 1989 Metal Oxyfluoride Coatings For Energy-Efficient Windows

K. A. Khan, S. J. Jiang, Z.-C. Jin, C. G. Granqvist

Proceedings Volume 1016, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VII; (1989) https://doi.org/10.1117/12.949924
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Indium-tin-oxyfluoride films were made by dc magnetron sputtering in Ar + 0₂ + CF₄ at a rate of 1.2 nms^-1. A wide-bandgap material, with refractive index ~1.5 and good durability, was produced. It is very well suited for antireflecting indium-tin-oxide coatings. Vanadium-oxyfluoride films were made by rf magnetron sputtering in Ar + 0₂ + CF₄. Thermo-chromism was studied by electrical and spectral optical measurements. Fluorination was found to yield a significant decrease of the luminous absorptance.

Citation Download Citation

K. A. Khan, S. J. Jiang, Z.-C. Jin, and C. G. Granqvist "Metal Oxyfluoride Coatings For Energy-Efficient Windows", Proc. SPIE 1016, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VII, (6 March 1989); https://doi.org/10.1117/12.949924

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