Gravimetric measurements with use of a cantilever for controlling of electrochemical deposition processes

Piotr Prokaryn; Pawel Janus; Jerzy Zajac; Andrzej Sierakowski; Krzysztof Domanski; Piotr Grabiec

doi:10.1117/12.2245041

10 November 2016 Gravimetric measurements with use of a cantilever for controlling of electrochemical deposition processes

Piotr Prokaryn, Pawel Janus, Jerzy Zajac, Andrzej Sierakowski, Krzysztof Domanski, Piotr Grabiec

Author Affiliations +

Proceedings Volume 10161, 14th International Conference on Optical and Electronic Sensors; 1016107 (2016) https://doi.org/10.1117/12.2245041
Event: 14th International Conference on Optical and Electronic Sensors, 2016, Gdansk, Poland

Abstract

In this paper we describe the method for monitoring the progress of electrochemical deposition process. The procedure allows to control the deposition of metals as well as conductive polymers on metallic seed layer. The method is particularly useful to very thin layers (1-10 nm) of deposited medium which mechanical or optical methods are troublesome for. In this method deposit is grown on the target and on the test silicon micro-cantilever with a metal pad. Galvanic deposition on the cantilever causes the change of its mass and consequently the change of its resonance frequency. Changes of the frequency is measured with laser vibro-meter then the layer thicknesses can be estimated basing on the cantilever calibration curve. Applying this method for controlling of gold deposition on platinum seed layer, for improving the properties of the biochemical sensors, is described in this paper.

Citation Download Citation

Piotr Prokaryn, Pawel Janus, Jerzy Zajac, Andrzej Sierakowski, Krzysztof Domanski, and Piotr Grabiec "Gravimetric measurements with use of a cantilever for controlling of electrochemical deposition processes", Proc. SPIE 10161, 14th International Conference on Optical and Electronic Sensors, 1016107 (10 November 2016); https://doi.org/10.1117/12.2245041

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