10 November 2016 Sol-gel layers for ceramic microsystems application
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Proceedings Volume 10161, 14th International Conference on Optical and Electronic Sensors; 101610B (2016) https://doi.org/10.1117/12.2245785
Event: 14th International Conference on Optical and Electronic Sensors, 2016, Gdansk, Poland
Abstract
This paper describes research on sol-gel solutions preparation process. Utilize of a sol-gel layers in the LTCC technology for reduction of surface roughness and influence on the ceramics properties is examined and described. The influence of sol-gel layer on possible sedimentation of dyes or biological substances in channels, mixers or chambers of ceramic microfluidic structures was investigated. Moreover, properties of sol-gel coated surfaces have been precisely examined and described. Finally, positive results of conducted experiments made it possible to design and manufacture a simple microfluidic ceramic structure, with embedded protective layer of sol-gel, for fluorescence measurements.
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Mateusz Czok, Mateusz Czok, Leszek Golonka, Leszek Golonka, } "Sol-gel layers for ceramic microsystems application", Proc. SPIE 10161, 14th International Conference on Optical and Electronic Sensors, 101610B (10 November 2016); doi: 10.1117/12.2245785; https://doi.org/10.1117/12.2245785
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