10 November 2016 Physical and optical properties of TiO2 nanolayers for integrated photonics application
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Proceedings Volume 10161, 14th International Conference on Optical and Electronic Sensors; 101610E (2016) https://doi.org/10.1117/12.2244141
Event: 14th International Conference on Optical and Electronic Sensors, 2016, Gdansk, Poland
Abstract
The paper presents investigation of physical properties of wide bandgap oxide semiconductor – titanium dioxide for applications in integrated photonics as well as for future applications in gas sensors structures. The investigation presented in the paper was focused on: surface topography of TiO2 layer measured by AFM method, as well as investigation of Raman shift obtained by Raman spectroscopy. Finally the integrated photonics in the form of planar waveguide is also presented.
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Przemysław Struk, Tadeusz Pustelny, "Physical and optical properties of TiO2 nanolayers for integrated photonics application", Proc. SPIE 10161, 14th International Conference on Optical and Electronic Sensors, 101610E (10 November 2016); doi: 10.1117/12.2244141; https://doi.org/10.1117/12.2244141
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