10 November 2016 Thin film two-electrode impedance sensor development and tests
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Proceedings Volume 10161, 14th International Conference on Optical and Electronic Sensors; 101610Y (2016) https://doi.org/10.1117/12.2244502
Event: 14th International Conference on Optical and Electronic Sensors, 2016, Gdansk, Poland
Abstract
A flexible thin film impedance sensor has been developed. Device manufacturing process and preparation of test wafers are described. Sensors with ring shaped Au electrodes have been fabricated on a polyimide substrate using Si wafer as a temporary substrate. The sensors have been characterized by means of Agilent 4294A analyzer and tested in measurements of impedance of human skin, Si wafers and other materials. Results of indirect measurements of samples covered with dielectric layer (SU-8, glass) confirm advantages of the sensors.
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Michał Zaborowski, Anna Baraniecka, Jerzy Zając, Krzysztof Domański, Piotr Grabiec, "Thin film two-electrode impedance sensor development and tests", Proc. SPIE 10161, 14th International Conference on Optical and Electronic Sensors, 101610Y (10 November 2016); doi: 10.1117/12.2244502; https://doi.org/10.1117/12.2244502
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