Developing piezoelectric, MEMS AHC arrays capable of mimicking the cochlea’s behavior is the main scope of this work. The design consists of a substrate material and two layers of Lead Zirconate Titanate (PZT) deposition that represents artificial hair cells. Abaqus finite element software is used to model the AHC arrays. Fundamental frequencies of the AHCs and also frequency response function due to a base excitation of the array are obtained by linear perturbation frequency analysis and steady-state linear dynamic analysis, respectively. As a proof of concept, a series of dynamic tests are conducted on larger scale single AHCs and an array of four AHCs to measure the response of the sensors to an external stimulus.
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Sheyda Davaria, Pablo A. Tarazaga, "MEMS scale artificial hair cell sensors inspired by the cochlear amplifier effect," Proc. SPIE 10162, Bioinspiration, Biomimetics, and Bioreplication 2017, 101620G (17 April 2017);