17 April 2017 Miniaturized accelerometer made with ZnO nanowires
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Miniaturized accelerometer is required in many applications, such as, robotics, haptic devices, gyroscopes, simulators and mobile devices. ZnO is an essential semiconductor material with wide direct band gap, thermal stability and piezoelectricity. Especially, well aligned ZnO nanowire is appropriate for piezoelectric applications since it can produce high electrical signal under mechanical load. To miniaturize accelerometer, an aligned ZnO nanowire is adopted to implement active piezoelectric layer of the accelerometer and copper is chosen for the head mass. To grow ZnO nanowire on the copper head mass, hydrothermal synthesis is conducted and the effect of ZnO nanowire length on the accelerometer performance is investigated. Refresh hydrothermal synthesis can increase the length of ZnO nanowire. The performance of the fabricated ZnO accelerometers is compared with a commercial accelerometer. Sensitivity and linearity of the fabricated accelerometers are investigated.
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Sangho Song, Sangho Song, Jeong Woong Kim, Jeong Woong Kim, Hyun Chan Kim, Hyun Chan Kim, Youngmin Yun, Youngmin Yun, Jaehwan Kim, Jaehwan Kim, } "Miniaturized accelerometer made with ZnO nanowires", Proc. SPIE 10167, Nanosensors, Biosensors, Info-Tech Sensors and 3D Systems 2017, 101671U (17 April 2017); doi: 10.1117/12.2259845; https://doi.org/10.1117/12.2259845

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